Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III
Madou, Marc J
Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III - 3 - London CRC Press 2012 - 642
MECHANICAL ENGINEERING
621.38152 MAD/FUN
Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III - 3 - London CRC Press 2012 - 642
MECHANICAL ENGINEERING
621.38152 MAD/FUN