TY - BOOK AU - Gardner, Julian W AU - Gardner, Julian WVaradan, Vijay K, Awadelkarim, Osama O TI - Microsensors MEMS and smart devices SN - 9788126540822 U1 - 621.381 GAR/VAR PY - 2013/// CY - New Delhi PB - Wiley KW - ELECTRONICS AND COMMUNICATION ENGINEERING ER -