TY  - BOOK
AU  - Madou, Marc J
AU  - Madou, Marc J
TI  - Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III
U1  - 621.38152 MAD/FUN 
PY  - 2012///
CY  - London
PB  - CRC Press
KW  - MECHANICAL ENGINEERING
ER  -