Kern, Werner <br/><br/>
Handbook of semiconductor water cleaning technology: science, technology and applications 

 - new jersy  Noyes Publications   1993 
 - 623 
<br/><br/><label>ISBN: </label>815513313 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRICAL AND ELECTRONICS ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.38152 KER/SEM