TY  - BOOK
AU  - Kern, Werner
AU  - Kern, Werner
TI  - Handbook of semiconductor water cleaning technology: science, technology and applications
SN  - 815513313
U1  - 621.38152 KER/SEM 
PY  - 1993///
CY  - new jersy
PB  - Noyes Publications 
KW  - ELECTRICAL AND ELECTRONICS ENGINEERING
ER  -