Campbell, Stephen A <br/><br/>
The science and engineering of microelectronic fabrication 

 - 2nd 
 - New York  Oxford University Press  2013 
 - 603 
<br/><br/><label>ISBN: </label>9780198084808 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRICAL AND ELECTRONICS ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM/THE