TY  - BOOK
AU  - Campbell, Stephen A
AU  - Campbell, Stephen A
TI  - The science and engineering of microelectronic fabrication
SN  - 9780198084808
U1  - 621.38152 CAM/THE 
PY  - 2013///
CY  - New York
PB  - Oxford University Press
KW  - ELECTRICAL AND ELECTRONICS ENGINEERING
ER  -