000			01071nam a2200193Ia 4500
005			20250114112748.0
008			230911s9999||||xx |||||||||||||| ||und||
020			_a9788131764756
040			_cNational Institute of Technology Goa
082			_a621.3 _bLIU/FOU
100			_aLiu, Chang
245		0	_aFoundations of MEMS
250			_a2nd
260			_aNoida: _b Pearson, _c 2017
300			_a576p.: 10x14x1; Paperback
520			_aAbout the book: Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
650			_aMechanical Engineering
942			_cBK _2ddc _n0
999			_c3430 _d3430