| 000 | 00492nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230911s9999||||xx |||||||||||||| ||und|| | ||
| 082 | _a621.38152 MAD/FUN | ||
| 100 | _aMadou, Marc J | ||
| 245 | 0 | _aFundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEWS manufacturing techniques and applications: Vol. III | |
| 250 | _a3 | ||
| 260 |
_aLondon _bCRC Press _c2012 |
||
| 300 | _a642 | ||
| 650 | _aMECHANICAL ENGINEERING | ||
| 700 | _aMadou, Marc J | ||
| 942 | _cBK | ||
| 999 |
_c3471 _d3471 |
||