| 000 | 00477nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230911s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a815513313 | ||
| 082 | _a621.38152 KER/SEM | ||
| 100 | _aKern, Werner | ||
| 245 | 0 | _aHandbook of semiconductor water cleaning technology: science, technology and applications | |
| 260 |
_anew jersy _bNoyes Publications _c1993 |
||
| 300 | _a623 | ||
| 650 | _aELECTRICAL AND ELECTRONICS ENGINEERING | ||
| 700 | _aKern, Werner | ||
| 942 | _cBK | ||
| 999 |
_c3542 _d3542 |
||